JPH0145029B2 - - Google Patents
Info
- Publication number
- JPH0145029B2 JPH0145029B2 JP18869583A JP18869583A JPH0145029B2 JP H0145029 B2 JPH0145029 B2 JP H0145029B2 JP 18869583 A JP18869583 A JP 18869583A JP 18869583 A JP18869583 A JP 18869583A JP H0145029 B2 JPH0145029 B2 JP H0145029B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- terminal
- needle
- probe needle
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 36
- 238000012360 testing method Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000005259 measurement Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 241001422033 Thestylus Species 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18869583A JPS6080772A (ja) | 1983-10-08 | 1983-10-08 | プロ−ブニ−ドル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18869583A JPS6080772A (ja) | 1983-10-08 | 1983-10-08 | プロ−ブニ−ドル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6080772A JPS6080772A (ja) | 1985-05-08 |
JPH0145029B2 true JPH0145029B2 (en]) | 1989-10-02 |
Family
ID=16228202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18869583A Granted JPS6080772A (ja) | 1983-10-08 | 1983-10-08 | プロ−ブニ−ドル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6080772A (en]) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0331077Y2 (en]) * | 1984-12-05 | 1991-07-01 | ||
JPS6361965A (ja) * | 1986-09-03 | 1988-03-18 | Ricoh Co Ltd | パタ−ン基板の検査方法および装置 |
JPS63128264A (ja) * | 1986-11-18 | 1988-05-31 | Nec Corp | プロ−ブ カ−ド |
JPH0611461Y2 (ja) * | 1988-06-13 | 1994-03-23 | アンリツ株式会社 | プローブ |
JPH05102258A (ja) * | 1991-10-08 | 1993-04-23 | Nippon Maikuronikusu:Kk | 探 針 |
JP2001311746A (ja) * | 2000-04-28 | 2001-11-09 | Mitsubishi Materials Corp | コンタクトプローブ及びプローブ装置 |
-
1983
- 1983-10-08 JP JP18869583A patent/JPS6080772A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6080772A (ja) | 1985-05-08 |
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